- Semiconductor
- Sub-fab and facilities
Sub-fab and facilities
Use cases of wafer manufacturing automation in sub-fab processes
Sub-fab processes in semiconductor manufacturing significantly benefit from automation, particularly through real-time monitoring for cost reduction and efficiency enhancement.
Applications
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Scrubbers
Discover how advanced monitoring solutions enhance scrubber efficiency, predictive maintenance and production quality.
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Chemical delivery system (CDS)
Safe and reliable chemical management from delivery to process tool.
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Dry vacuum pump
Improve the availability of your vacuum pump by means of ifm hardware and software solutions for condition monitoring.
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Ultrapure water system
Discover how ifm’s advanced sensor technology ensures water quality, equipment availability and production efficiency in ultrapure water systems.